Dry Screw Vacuum Pump is a vacuum equipment designed with oil-free lubrication, which achieves gas suction and compression through the reverse rotation of two precision meshing screw rotors in the pump chamber, and directly discharges to the atmosphere or the next stage pump. Its core features include oil-free (suitable for clean processes), compact structure (space saving twin-screw design), easy maintenance (no need for oil replacement), and corrosion resistance (able to handle corrosive gases). It is mainly used in fields such as semiconductor manufacturing, chemical processes, and pharmaceutical production that require high vacuum cleanliness. At the same time, due to its low energy consumption and stable operation, it gradually replaces traditional oil sealed vacuum pumps.
The dry
Screw Vacuum Pump adopts an oil-free lubrication design, completely avoiding the risk of oil pollution, and is particularly suitable for industries such as semiconductors and pharmaceuticals that require strict cleanliness; The twin-screw rotor structure not only operates smoothly and with minimal vibration, but also efficiently processes corrosive gases and condensable steam; Low maintenance cost (no need for oil replacement and filtration system) and optimized energy consumption, with significant long-term economic benefits; In addition, the compact modular design saves installation space and supports continuous high load operation, with reliability far exceeding traditional oil sealed vacuum pumps.
Dry screw vacuum pumps are widely used in industrial fields with strict requirements for vacuum cleanliness due to their characteristics of no oil pollution, corrosion resistance, and high efficiency and stability. Its core application scenarios include: semiconductor manufacturing (avoiding oil vapor pollution in wafer processing and coating processes) ^ ^, chemical processes (processing corrosive gases or condensable vapors, such as polymer production and fine chemicals) ^ ^, and pharmaceutical and biotechnology (sterile drug production, freeze-drying equipment requiring a clean vacuum environment) ^ ^; In addition, it also covers food packaging (oil-free vacuum pumping to extend shelf life), photovoltaic industry (solar panel lamination process), and scientific research instruments (equipment requiring high-purity vacuum such as electron microscopes and mass spectrometry analysis) ^ ^. Compared to traditional oil sealed pumps, its strong adaptability and low maintenance costs make it the mainstream choice to replace polluting vacuum equipment in modern industry.